Your Address : Globalchemmade--Foshan Huate Gases Co.,Ltd
Name:Foshan Huate Gases Co.,Ltd
Type:Others
Tel:86-757-85126928
Fax:86-757-85123424
Email:damonhuang@scsgti.com
Address:China(Mainland)
Products detail
| Product Name: | hexafluoroethane/R116 |
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| CAS No: | 76-16-4 | |
| Product Type: | Organic Chemicals and Derivatives -> Hydrocarbons | |
| Product spec: | 99.5%~99.999% purity grade | |
| Packing: | ||
| Post Time: | 2012-05-30 | |
| Usage: | ||
| Description: | Purity Grade customized Formula C2F6 Application Hexafluoroethane is used as a versatile etchant in semiconductor manufacturing. It can be used for ive etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon.Together with trifluoromethane it is used in refrigerants R508A (61%) and R508B (54%). Molecular Weight 138.01g /mol Alternative name Carbon hexafluoride,1,1,1,2,2,2-Hexafluoroethane,Perfluoroethane, Ethforane, Halocarbon 116, PFC-116, CFC-116, R-116, Arcton 116, Halon 2600 CAS No. 76-16-4 Package N/A | |