Your Address : Globalchemmade--Foshan Huate Gases Co.,Ltd
Name:Foshan Huate Gases Co.,Ltd
Type:Others
Tel:86-757-85126928
Fax:86-757-85123424
Email:damonhuang@scsgti.com
Address:China(Mainland)
Products detail
| Product Name: | tungsten hexafluoride |
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| CAS No: | 7783-82-6 | |
| Product Type: | Inorganic Chemicals -> Others | |
| Product spec: | 99.5%~99.999% purity grade | |
| Packing: | ||
| Post Time: | 2012-05-30 | |
| Usage: | ||
| Description: | Purity Grade customized Formula WF6 Application The dominant application of tungsten fluoride is in semiconductor industry, where it is widely used for depositing tungsten metal in a chemical vapor deposition process. The required WF6 gas purity is rather high and varies between 99.98% and 99.9995% depending on the application. WF6 molecules have to be split up in the CVD process. The decomposition is usually facilitated by mixing WF6 with hydrogen, silane, germane, diborane, phosphine, and related hydrogen-containing gases. Molecular Weight 297.83g /mol Alternative name N/A CAS No. 7783-82-6 Package N/A | |